The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2007
Filed:
Mar. 24, 2005
Kazuo Takahashi, Miyagi, JP;
Takashi Tamura, Miyagi, JP;
Junichi Honda, Miyagi, JP;
Teruo Inaguma, Miyagi, JP;
Kazuo Takahashi, Miyagi, JP;
Takashi Tamura, Miyagi, JP;
Junichi Honda, Miyagi, JP;
Teruo Inaguma, Miyagi, JP;
Sony Corporation, Tokyo, JP;
Abstract
Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode, formed along the length of the oscillatorfor applying the voltage for causing oscillations of the oscillator, and first and second detection electrodes, formed on both sides of the driving electrodeparallel to the longitudinal direction of the oscillator, without contacting with the driving electrode. With a width Wof the driving electrode, a width Wof the first detection electrode, a width Wof the second detection electrodeand with W=WWW, the condition of 0.5<(W/W)<1 is to be met.