The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2007
Filed:
May. 10, 2005
Anthony Dicarlo, Richardson, TX (US);
Rabah Mezenner, Richardson, TX (US);
James C. Baker, Coppell, TX (US);
Mark A. Franklin, Plano, TX (US);
George Harakas, Garland, TX (US);
Anthony DiCarlo, Richardson, TX (US);
Rabah Mezenner, Richardson, TX (US);
James C. Baker, Coppell, TX (US);
Mark A. Franklin, Plano, TX (US);
George Harakas, Garland, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
As robust hinge post structure for use with torsional hinged devices such as micromirrors and method of manufacturing is disclosed. The fabrication process uses a protective layer such as BARC on the bottom of the aperture used to form the hinge post structure to protect an oxide layer during an etching step. The oxide layer, in turn protects the metal layer at the bottom of the aperture. Therefore, the metal layer, the oxide layer, and the protective layer prevent the erosion and/or pitting of the bottom electrode during a cleaning process, and provide additional support to the structure.