The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2007
Filed:
Oct. 04, 2005
Chin B. Cheah, Kedah Darul Aman, MY;
Kandasamy Sundaram, Kedah Darul Aman, MY;
Rajagopal Ramakrishnan, Kedah Darul Aman, MY;
Arjun Kumar, Kedah Darul Aman, MY;
Chin B. Cheah, Kedah Darul Aman, MY;
Kandasamy Sundaram, Kedah Darul Aman, MY;
Rajagopal Ramakrishnan, Kedah Darul Aman, MY;
Arjun Kumar, Kedah Darul Aman, MY;
Silterra Malaysia Sdn. Bhd., Kedah Darul Aman, MY;
Abstract
A method for monitoring the depth of at least one via () in a wafer including the steps of arranging the via () as a capacitive plate (), providing a corresponding capacitive plate (), applying an electrical potential difference to the via () and the corresponding capacitive plate (), measuring the resultant capacitance between the via () and a corresponding capacitive plate () and determining the depth of the at least one via () by the capacitance.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile