The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2007
Filed:
Mar. 24, 2006
Sven Axenbeck, Neuenburg, DE;
Markus Bannwarth, Freiburg, DE;
Martin Steuber, Buggingen, DE;
Alfred Trusch, Breisach, DE;
Lothar Wolf, Sasbach, DE;
Peter Wiedemuth, Herbolzheim, DE;
Gerhard Zähringer, Freiburg, DE;
Sven Axenbeck, Neuenburg, DE;
Markus Bannwarth, Freiburg, DE;
Martin Steuber, Buggingen, DE;
Alfred Trusch, Breisach, DE;
Lothar Wolf, Sasbach, DE;
Peter Wiedemuth, Herbolzheim, DE;
Gerhard Zähringer, Freiburg, DE;
Huettinger Elektronik GmbH + Co. KG, Freiburg, DE;
Abstract
New methods are used for detecting arcs in a plasma process that is fed by, for example, a freely oscillating AC generator with an output signal of the AC generator for supplying power. The method includes measuring or determining a reference value that is based on a time response of the output signal or of an internal signal of the AC generator relating to the output signal. The methods also include comparing the reference value with a threshold value and detecting an arc when a predetermined result of the comparison is obtained.