The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2007
Filed:
Aug. 31, 2005
Tsuneo Takashima, Tochigi, JP;
Tsuneo Takashima, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A stage apparatus includes a guide provided with a surface including a magnetic body, a moving body movable along the surface, a gas bearing for supporting the moving body with respect to the surface, and a magnet which is supplied to the moving body and produces a magnetic attractive force with the magnetic body. The surface of the guide has edges to define its size in a width direction, which is orthogonal to a traveling direction of the moving body to limit movement of the moving body in the width direction, using a magnetic attractive force of the magnet in a direction parallel to the surface, and to apply pre-pressure to the gas bearing.