The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2007
Filed:
Aug. 01, 2005
Hyung-ho Ko, Seoul, KR;
Chang-ki Hong, Gyeonggi-do, KR;
Sang-jun Choi, Seoul, KR;
Dong-gyun Han, Gyeonggi-do, KR;
Hyung-Ho Ko, Seoul, KR;
Chang-Ki Hong, Gyeonggi-do, KR;
Sang-Jun Choi, Seoul, KR;
Dong-Gyun Han, Gyeonggi-do, KR;
Abstract
A method for cleaning a semiconductor substrate forming device isolation layers in a predetermined region of a semiconductor substrate to define active regions; etching predetermined areas of the active regions to form a recess channel region and such that sidewalls of the device isolation layers are exposed; and selectively etching a surface of the recess channel region using a predetermined cleaning solution to clean the semiconductor substrate where the recess channel region has been formed.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile