The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2007
Filed:
Jan. 30, 2006
Franz Lärmer, Weil der Stadt, DE;
Silvia Kronmüller, Schwaikheim, DE;
Christina Leinenbach, Ensdorf, DE;
Franz Lärmer, Weil der Stadt, DE;
Silvia Kronmüller, Schwaikheim, DE;
Christina Leinenbach, Ensdorf, DE;
Robert Bosch GmbH, Stuttgart, DE;
Abstract
A micromechanical component having a substrate conductive in at least some regions; an elastically deflectable diaphragm, which is conductive in at least some regions, arches over a front side of the substrate, and is electrically insulated from the substrate, the diaphragm having an inner region (I; I') and an edge region (RB; RB′); and a hollow space (H), which is provided between the substrate () and the diaphragm (M); the inner region (I; I′) having a cross-section that is modified in comparison with the edge region (RB; RB′), which means that the bending of the inner region (I; I′) is less than that in the case of an identical cross-section.