The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2007
Filed:
Mar. 22, 2005
Taiji Kiku, Handa, JP;
Akiyoshi Hattori, Handa, JP;
Taiji Kiku, Handa, JP;
Akiyoshi Hattori, Handa, JP;
NGK Insulators, Ltd., Nagoya, JP;
Abstract
An object of the present invention is to provide a ceramic susceptor for considerably reducing the count number of metal atoms on the surface of a semiconductor after the semiconductor is treated, specifically to 1×10atoms/cmor lower. It is provided a ceramic susceptorhaving a face for mounting semiconductorwherein each of metal elements other than metal element(s) constituting the ceramic material has a count number of 1×10atoms/cmor lower. It is further provided a method of cleaning a ceramic susceptorhaving a facefor mounting semiconductor, wherein the susceptor is cleaned using a complexing agent capable of forming a complex with a metal element.