The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2007
Filed:
Mar. 07, 2006
Sung-taok Moon, Suwon-si, KR;
Dong-jun Lee, Seoul, KR;
Jae-hyun SO, Seoul, KR;
Kyoung-moon Kang, Gwangmyeong-si, KR;
Bong-su Ahn, Seoul, KR;
Sung-Taok Moon, Suwon-si, KR;
Dong-Jun Lee, Seoul, KR;
Jae-Hyun So, Seoul, KR;
Kyoung-Moon Kang, Gwangmyeong-si, KR;
Bong-Su Ahn, Seoul, KR;
Samsung Electronics Co., Ltd., Gyeonggi-do, KR;
Abstract
A pad conditioner may include a surface having a first region including a portion having relatively irregular shaped and friable polishing particles, and a second region including a portion having relatively regular shaped and tough polishing particles. The relatively regular shaped and tough polishing particles may be provided on the edge portion of the surface and the relatively irregular shaped and friable polishing particles may be provided on the center portion of the surface.