The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 28, 2007
Filed:
Jun. 23, 2005
Satoshi Ohuchi, Hyogo, JP;
Hiroyuki Aizawa, Osaka, JP;
Toshiyuki Nozoe, Kyoto, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
Provided are an angular velocity sensor with improved reliability by preventing an electric short circuit resulting from etching debris left on the bottom electrode after the etching of the conductive layers, and a method for manufacturing the angular velocity sensor. The drive electrode unit, the monitor electrode unit and the sensing electrode unit are each provided with bottom electrode () formed on substrate () having the shape of a tuning fork, piezoelectric film () made of piezoelectric material and formed on bottom electrode (), and top electrode () formed on piezoelectric film (). Ends (T) of top electrode () are located inside ends (T) of piezoelectric film () so as to expose ends (T) of piezoelectric film () beyond top electrode (), thereby forming exposed parts (). When exposed parts () have a thickness of 't', piezoelectric film () is made to have an exposed width (L) of not less than 0.3 t.