The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2007
Filed:
Oct. 07, 2004
Hirohiko Goto, Akashi, JP;
Shiro Oda, Anjo, JP;
Hirohiko Goto, Akashi, JP;
Shiro Oda, Anjo, JP;
Kawasaki Jukogyo Kabushiki Kaisha, Kobe, JP;
Abstract
A substrate holding device includes: holding members configured to hold substrates, the holding members being arranged along a predetermined arranging direction and being movable along the arranging direction; an interlocking mechanism interlocking the holding members for simultaneous coordinate movement along the arranging direction to change intervals between the holding members with respect to the arranging direction; driving unit for driving the holding members for shifting at least along the arranging direction; and control unit for controlling the driving unit to shift the holding members to substrate taking positions where the holding members are able to hold substrates, respectively, in accordance with a mapping information about a condition of arrangement of the substrates arranged along the arranging direction.