The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 21, 2007

Filed:

Aug. 30, 2000
Applicants:

Peter Ledel Gammel, Millburn, NJ (US);

Richard Edwin Howard, Highland Park, NJ (US);

Omar Daniel Lopez, Summit, NJ (US);

Wei Zhu, Warren, NJ (US);

Inventors:

Peter Ledel Gammel, Millburn, NJ (US);

Richard Edwin Howard, Highland Park, NJ (US);

Omar Daniel Lopez, Summit, NJ (US);

Wei Zhu, Warren, NJ (US);

Assignee:

Agere Systems Inc., Allentown, PA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A microelectromechanical microwave vacuum tube device is disclosed. The device consists of a cathode formed on a substrate, the cathode comprising electron emitters. A cathode emission control grid is also attached to the device substrate. The device further includes an output structure where amplified microwave power is removed from the device. In the device, the cathode surface and the grid surface are substantially parallel to each other and substantially perpendicular to the substrate. One of either the cathode, the grid, or both the cathode and the grid, are attached to the device substrate by one or more flexural members. The device further comprises an anode that is substantially parallel to the cathode surface and the grid surface.


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