The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2007
Filed:
Aug. 04, 2004
Robert M. Pailthorp, Portland, OR (US);
Weisheng Lei, Portland, OR (US);
Hisashi Matsumoto, Hillsboro, OR (US);
Glenn Simenson, Portland, OR (US);
David A. Watt, Beaverton, OR (US);
Mark A. Unrath, Portland, OR (US);
William J. Jordens, Beaverton, OR (US);
Robert M. Pailthorp, Portland, OR (US);
Weisheng Lei, Portland, OR (US);
Hisashi Matsumoto, Hillsboro, OR (US);
Glenn Simenson, Portland, OR (US);
David A. Watt, Beaverton, OR (US);
Mark A. Unrath, Portland, OR (US);
William J. Jordens, Beaverton, OR (US);
Electro Scientific Industries, Inc., Portland, OR (US);
Abstract
High speed removal of material from a specimen employs a beam positioner for directing a laser beam axis along various circular and spiral laser tool patterns. A preferred method of material removal entails causing relative movement between the axis of the beam and the specimen, directing the beam axis at an entry segment acceleration and along an entry trajectory to an entry position within the specimen at which laser beam pulse emissions are initiated, moving the beam axis at a circular perimeter acceleration within the specimen to remove material along a circular segment of the specimen, and setting the entry segment acceleration to less than twice the circular perimeter acceleration.