The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2007
Filed:
Mar. 09, 2005
Applicants:
Robert D. Horning, Savage, MN (US);
Mark W. Weber, Zimmerman, MN (US);
Burgess R. Johnson, Bloomington, MN (US);
Inventors:
Robert D. Horning, Savage, MN (US);
Mark W. Weber, Zimmerman, MN (US);
Burgess R. Johnson, Bloomington, MN (US);
Assignee:
Honeywell International Inc., Morristown, NJ (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/125 (2006.01); G01P 9/04 (2006.01);
U.S. Cl.
CPC ...
Abstract
Methods of fabricating thinned comb MEMS devices are disclosed. A comb drive device in accordance with an illustrative embodiment of the present invention can include a number of interdigitated comb fingers some of which have a reduced thickness along at least a portion of their length relative to other comb fingers.