The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 21, 2007
Filed:
Sep. 18, 2006
Wei Gao, Sendai, JP;
Satoshi Kiyono, Sendai, JP;
Yoshiyuki Tomita, Yokosuka, JP;
Makoto Tano, Sendai, JP;
Wei Gao, Sendai, JP;
Satoshi Kiyono, Sendai, JP;
Yoshiyuki Tomita, Yokosuka, JP;
Makoto Tano, Sendai, JP;
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Abstract
This invention relates to a stage device which is moved with high accuracy in an X-Y direction and a rotating direction using a planar motor. The invention is aimed at reducing the size of the stage device and at performing accurately measurement of a position of the stage to the base. The stage device comprises a scale unit having a scale part on the entire plane of the base, and three two-dimensional angle sensors disposed on a bottom surface of a movable stage part. The scale unit and the two-dimensional angle sensors form a surface encode. A position of the movable stage part is measured by the surface encoder.