The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 14, 2007

Filed:

Dec. 11, 2003
Applicants:

Benjamin L. Hall, Corning, NY (US);

Martin HU, Painted Post, NY (US);

Mike J. White, Lawrenceville, PA (US);

Chung-en Zah, Holmdel, NJ (US);

Inventors:

Benjamin L. Hall, Corning, NY (US);

Martin Hu, Painted Post, NY (US);

Mike J. White, Lawrenceville, PA (US);

Chung-En Zah, Holmdel, NJ (US);

Assignee:

Corning Incorporated, Corning, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G01R 1/04 (2006.01); G01R 31/26 (2006.01);
U.S. Cl.
CPC ...
Abstract

An array tester () characterizes individual ones () of a semiconductor devices of an array () based on polarization-resolving an optical far-field measurement of the individual chips () as a function of angular position. Two pairs of TM and TE detectors (-and-) or one pair displaceable by ninety degrees, move in vertical and horizontal arc paths or fixed around a fixed position of a selected device of an array to sample the far-fields.


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