The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2007
Filed:
Sep. 13, 2003
Michael K. Gallagher, Hopkinton, MA (US);
Dana A. Gronbeck, Holliston, MA (US);
Timothy G. Adams, Sudbury, MA (US);
Jeffrey M. Calvert, Acton, MA (US);
Michael K. Gallagher, Hopkinton, MA (US);
Dana A. Gronbeck, Holliston, MA (US);
Timothy G. Adams, Sudbury, MA (US);
Jeffrey M. Calvert, Acton, MA (US);
Shipley Company, L.L.C., Marlborough, MA (US);
Abstract
A method of forming air gaps within a solid structure is provided. In this method, a sacrificial material is covered by an overlayer. The sacrificial material is then removed through the overlayer to leave an air gap. Such air gaps are particularly useful as insulation between metal lines in an electronic device such as an electrical interconnect structure. Structures containing air gaps are also provided.