The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2007
Filed:
Sep. 11, 2003
Applicants:
Renato Conta, Ivrea, IT;
Irma Disegna, Rondissone, IT;
Inventors:
Renato Conta, Ivrea, IT;
Irma Disegna, Rondissone, IT;
Assignee:
Telecom Italia S.p.A, Milan, IT;
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01); H01L 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
On a die that has etchings on a surface, firstly a sheet of negative photoresist is laid down which, by means of an exposure and subsequent development, is left only above the etchings; then, upon the negative photoresist, a positive photoresist is applied, which is subjected to exposure and development to produce functional geometries deposited in thin film; subsequently the positive photoresist is removed in a 'lift-off' operation, and the negative photoresist is taken off in a plasma operation, thus revealing the etchings.