The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 14, 2007
Filed:
May. 09, 2006
Masami Murai, Nagano-ken, JP;
Masami Murai, Nagano-ken, JP;
Seiko Epson Corporation, Tokyo, JP;
Abstract
A piezoelectric element with stable and excellent piezoelectric properties is made by: a step of forming a diaphragm() on a substrate(S); a step of forming a bottom electrodeon the diaphragm(S); a step of forming a first piezoelectric layeron the bottom electrode(S); a step of patterning both the piezoelectric layerand the bottom electrode(S); a step of forming a second piezoelectric layer on the piezoelectric layerand on the diaphragmto mature a piezoelectric film(S); and a step of forming a top electrodeon the piezoelectric film(S).
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile