The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2007
Filed:
Nov. 20, 2003
Applicants:
Dirk L. Basting, Fort Lauderdale, FL (US);
Kai Schmidt, 37327 Leiuelelde, DE;
Holger Bald, 37081 Göttinger, DE;
Christian Schramm, 37120 Bouenden, DE;
Inventors:
Dirk L. Basting, Fort Lauderdale, FL (US);
Kai Schmidt, 37327 Leiuelelde, DE;
Holger Bald, 37081 Göttinger, DE;
Christian Schramm, 37120 Bouenden, DE;
Assignee:
Other;
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A process for the determination and correction of laser induced damages of the optical and electronic components within the beam path of a monitor module of a 193 nm excimer lasers is provided herein. Especially state of the art detectors like CCD cameras degrade under UV radiation. With a special correction of the sensitivity of each camera pixel this problem can be solved.