The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2007
Filed:
Jun. 09, 2005
Yuji Mitsui, Nagano, JP;
Yuji Mitsui, Nagano, JP;
Seiko Epson Corporation, , JP;
Abstract
A method for manufacturing a surface acoustic wave element including: forming a conductive film on a surface of a piezoelectric substrate; forming a photoresist film on the conductive film; printing a pattern by exposing and developing the pattern, which is originally provided on a photomask, onto the photoresist film by reduced projection; forming an electrode of a surface acoustic wave element by etching the conductive film using the patterned photoresist film as a mask; measuring a resonant frequency of the surface acoustic wave element formed on the piezoelectric substrate; calculating an anodic oxidation voltage based on an amount of anodic oxidation of the electrode that is calculated in advance from the measured resonant frequency and a preset target resonant frequency; and performing anodic oxidation based on the anodic oxidation voltage calculated in the voltage calculation step and finishing anodic oxidation after detecting an end-point of oxidation reaction of the electrode.