The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2007
Filed:
Apr. 05, 2004
Pai-hsueh Yang, Palo Alto, CA (US);
Kazuhiro Hirano, Saitama, JP;
Ping-wei Chang, San Jose, CA (US);
Tim Teng, Fremont, CA (US);
Bausan Yuan, San Jose, CA (US);
Pai-Hsueh Yang, Palo Alto, CA (US);
Kazuhiro Hirano, Saitama, JP;
Ping-Wei Chang, San Jose, CA (US);
Tim Teng, Fremont, CA (US);
Bausan Yuan, San Jose, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
A stage assembly () for moving a device () includes a stage (), and actuator pair () and a control system (). The actuator pair () includes a first actuator () that is coupled to the stage (). The first actuator () has a first E core () and a first I core () that is spaced apart a first gap (g) from the first E core (). The control system () directs current to the first actuator () to move the stage (). In one embodiment, the amount of current directed to the first actuator () is determined utilizing a first parameter (a) that is added to the first gap (g). The value of the first parameter (a) is determined by experimental testing. Additionally, the amount of current directed to the first actuator () can be determined utilizing a second parameter (b) that is added to the first gap (g). The value of the second parameter (b) is determined by experimental testing.