The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2007
Filed:
Feb. 28, 2005
Applicant:
Yuki Yamada, Yokohama, JP;
Inventor:
Yuki Yamada, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor memory device includes a semi-conductor substrate, a MOS transistor formed on the semiconductor substrate and including a pair of impurity regions as a source and a drain, and a gate electrode, a first conductive plug formed in contact with an upper surface of one of the pair of impurity regions, and a planar ferroelectric capacitor formed by stacking a lower electrode layer, a ferroelectric layer and an upper electrode layer on the first conductive plug, a side face upper end of the first conductive plug being aligned with a corresponding part of a side face of the ferroelectric capacitor.