The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2007
Filed:
Jul. 22, 2004
Michikazu Matsumoto, Kyoto, JP;
Yasutoshi Okuno, Kyoto, JP;
Katsuyoshi Joukyu, Toyama, JP;
Tetsuya Matsutani, Kyoto, JP;
Michikazu Matsumoto, Kyoto, JP;
Yasutoshi Okuno, Kyoto, JP;
Katsuyoshi Joukyu, Toyama, JP;
Tetsuya Matsutani, Kyoto, JP;
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Abstract
A resistance defect assessment device provided on a wafer for assessing a resistance variation defect in a component of an integrated circuit device, the resistance defect assessment device including test patterns capable of measuring a resistance variation component to be the resistance variation defect in each chip area or each shot area of the wafer, wherein the number of test patterns included in one chip area or one shot area is set so that it is possible to estimate the yield of the integrated circuit device.