The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 07, 2007

Filed:

Jul. 20, 2005
Applicants:

Minhwan Lee, Stanford, CA (US);

Ryan O′hayre, Castle Rock, CO (US);

Turgut M. Gur, Palo Alto, CA (US);

Friedrich B. Prinz, Woodside, CA (US);

Inventors:

Minhwan Lee, Stanford, CA (US);

Ryan O′Hayre, Castle Rock, CO (US);

Turgut M. Gur, Palo Alto, CA (US);

Friedrich B. Prinz, Woodside, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G21K 7/00 (2006.01); G01N 23/00 (2006.01); H01L 21/44 (2006.01); B05D 5/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

The present invention provides nano-patterning based on flow of an ion current within an ionic conductor to bring ions in proximity to a microscope probe tip touching a surface of the conductor. These ions are then electrochemically reduced to form one or more features on the surface. Ion current flow and the electrochemical reaction are driven by an electrical potential difference between the tip and the ionic conductor. Such features can be erased by reversing the polarity of the potential difference. Indentations can be formed by mechanically removing features formed as described above. The ions in the ion current can be provided by the ionic conductor and/or by oxidation at a counter electrode.


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