The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2007
Filed:
Jun. 02, 2004
Applicants:
Khoi Phan, San Jose, CA (US);
Bhanwar Singh, Morgan Hill, CA (US);
Bharath Rangarajan, Sunnyvale, CA (US);
Ramkumar Subramanian, Sunnyvale, CA (US);
Inventors:
Khoi Phan, San Jose, CA (US);
Bhanwar Singh, Morgan Hill, CA (US);
Bharath Rangarajan, Sunnyvale, CA (US);
Ramkumar Subramanian, Sunnyvale, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A system and method are provided for detecting contaminants or defects on a reticle in-situ. The system and method provide a system that measures the optical transmission through clear areas on a reticle and determines whether the optical transmission of a reticle has been degraded by contaminants or other defects.