The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2007
Filed:
Feb. 02, 2005
Michael Sogard, Menlo Park, CA (US);
Mark Takita, Palo Alto, CA (US);
Michael Sogard, Menlo Park, CA (US);
Mark Takita, Palo Alto, CA (US);
Nikon Corporation, Tokyo, JP;
Abstract
A heating assembly () for heating a cathode () of an electron gun () of an exposure apparatus () includes a radiation source () and a beam shaper (). The radiation source () generates a source beam (). The beam shaper () receives the source beam () and selectively shapes the source beam () into a shaped beam () that is directed to the cathode (). In certain embodiments, the beam shaper () can readily change the shape and intensity profile of the shaped beam () to achieve a desired electron beam () from the electron gun (). In one embodiment, the radiation source () generates a pulsed source beam ().