The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2007
Filed:
Aug. 12, 2003
Joseph Patrick Rymer, Livermore, CA (US);
Rafael Ricolcol, Freemont, CA (US);
Joseph Patrick Rymer, Livermore, CA (US);
Rafael Ricolcol, Freemont, CA (US);
Tosoh SET, Inc., Dublin, CA (US);
Abstract
An improved component for use in a deposition chamber is constructed from ceramic zirconia and a stabilizing compound. The zirconia is preferably in a partially stabilized form and is coated with a metallic layer such as thermally sprayed aluminum. The surface of the zirconia is roughened to improve adhesion between the zirconia and the aluminum. Alternatively, an intermediate layer may be deposed between the zirconia and the metallic layer to improve the bonding between the layers. The coated zirconia component resists flaking when covered with materials that are being deposited in the deposition chamber and, thus, reduces the likelihood that devices being constructed in the deposition chamber will be contaminated by loose particles.