The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2007
Filed:
Dec. 29, 2004
Applicants:
Alexandra Abbadie, Ueylan, FR;
Pascal Besson, Notre Dame de Meśage, FR;
Marie-noëlle Semeria, Grenoble, FR;
Inventors:
Alexandra Abbadie, Ueylan, FR;
Pascal Besson, Notre Dame de Meśage, FR;
Marie-Noëlle Semeria, Grenoble, FR;
Assignee:
Commissariat A l'Energie Atomique, Paris, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23G 1/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Method of wet cleaning a surface of at least one material chosen from silicon, silicon-germanium alloys, A(III)/B(V)-type semiconductors and epitaxially grown crystalline materials, such as germanium, in which method the following successive steps are carried out: Process for fabricating an electronic, optical or optoelectronic device, such as a CMOS or MOSFET device, comprising at least one wet cleaning step using the said cleaning method.