The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2007
Filed:
Feb. 18, 2004
Sipke Wadman, Eindhoven, NL;
Sipke Wadman, Eindhoven, NL;
Koninklijke Philips Electronics, N.V., Eindhoven, NL;
Abstract
A scatterometer comprising a source () for providing an incident radiation beam () to be directed to the surface of a sample (), and means for directing said incident radiation beam () at different angles towards the surface of the sample (). The scatterometer furthermore comprising a screen () for receiving the reflection () of the incident radiation beam (), and a camera () for recording the scatter profile () as projected on said screen () by the reflected radiation beam (). The scatterometer is provided with means () for moving the screen () and thereby keeping it in the reflected radiation beam (), and with means for keeping the camera () directed to the moving screen ().