The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 24, 2007

Filed:

Oct. 30, 2003
Applicants:

Simon Dodd, Corvallis, OR (US);

Michael D. Miller, Philomath, OR (US);

Joseph M. Torgerson, Corvallis, OR (US);

Inventors:

Simon Dodd, Corvallis, OR (US);

Michael D. Miller, Philomath, OR (US);

Joseph M. Torgerson, Corvallis, OR (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/544 (2006.01); H01L 21/70 (2006.01); G01B 11/14 (2006.01);
U.S. Cl.
CPC ...
Abstract

An optical target is provided. In one embodiment, the target is formed on a substrate. The target includes a first layer deposited below a second layer on the substrate. The second layer is deposited below a third layer on the substrate. The first layer has a topographic contour formed thereon, the first layer at least partially projecting a patterned topographical contour through the second layer to the third layer.


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