The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2007
Filed:
Dec. 16, 2002
Applicants:
Eric M. Leproust, Campbell, CA (US);
Lalitha Reddy, Los Gatos, CA (US);
Michel G M Perbost, Bethany, CT (US);
Inventors:
Eric M. Leproust, Campbell, CA (US);
Lalitha Reddy, Los Gatos, CA (US);
Michel G M Perbost, Bethany, CT (US);
Assignee:
Agilent Technologies, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
A61L 33/00 (2006.01); B05D 3/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention provides a method and apparatus for micro array fabrication exclusive from the impact of a gas. A housing with a gas free chamber provides for improved micro array fabrication with a lower defect rate. The invention provides a housing that excludes a gas such as ozone to prevent interaction with probe construction or attachment. A method of fabricating a micro array in an ozone free environment is also disclosed.