The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 24, 2007
Filed:
Oct. 09, 2002
Michael X. Yang, Palo Alto, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Yezdi Dordi, Palo Alto, CA (US);
Saravjeet Singh, Santa Clara, CA (US);
Sheshraj Tulshibagwale, Los Altos, CA (US);
Nicolay Kovarsky, Sunnyvale, CA (US);
Michael X. Yang, Palo Alto, CA (US);
Dmitry Lubomirsky, Cupertino, CA (US);
Yezdi Dordi, Palo Alto, CA (US);
Saravjeet Singh, Santa Clara, CA (US);
Sheshraj Tulshibagwale, Los Altos, CA (US);
Nicolay Kovarsky, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the invention may generally provide a small volume electrochemical plating cell. The plating cell generally includes a fluid basin configured to contain a plating solution therein, the fluid basin having a substantially horizontal weir. The cell further includes an anode positioned in a lower portion of the fluid basin, the anode having a plurality of parallel channels formed therethrough, and a base member configured to receive the anode, the base member having a plurality of groves formed into an anode receiving surface, each of the plurality of grooves terminating into an annular drain channel. A membrane support assembly configured to position a membrane immediately above the anode in a substantially planar orientation with respect to the anode surface is provided, the membrane support assembly having a plurality of channels and bores formed therein.