The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Dec. 10, 2003
Hisashi Isozaki, Tokyo-to, JP;
Takuji Sato, Tokyo-to, JP;
Yoshiyuki Enomoto, Tokyo-to, JP;
Hiroyuki Maekawa, Tokyo-to, JP;
Hisashi Isozaki, Tokyo-to, JP;
Takuji Sato, Tokyo-to, JP;
Yoshiyuki Enomoto, Tokyo-to, JP;
Hiroyuki Maekawa, Tokyo-to, JP;
Kabushiki Kaisha Topcon, Tokyo-to, JP;
Abstract
A method for surface inspection, comprising the step of projecting at least two laser beams with different wavelengths to a same point to be inspected via a same projecting lens, the step of setting incident angles of the two laser beams so that fluctuations of values of reflectivity of the laser beams are complementary to each other, and the step of detecting reflected scattered light components.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile