The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Feb. 28, 2005
Shiou-jyh Ja, Stillwater, OK (US);
Lloyd Salsman, Stillwater, OK (US);
Brian Strecker, Stillwater, OK (US);
Robert Shelton, Stillwater, OK (US);
Frederick G. Johnson, Lanham, MD (US);
Shiou-jyh Ja, Stillwater, OK (US);
Lloyd Salsman, Stillwater, OK (US);
Brian Strecker, Stillwater, OK (US);
Robert Shelton, Stillwater, OK (US);
Frederick G. Johnson, Lanham, MD (US);
Nomadics, Inc., Stillwater, OK (US);
Abstract
An optically-powered integrated microstructure pressure sensing system for sensing pressure within a cavity. the pressure sensing system comprises a pressure sensor having an optical resonant structure subject to the pressure within the cavity and having physical properties changing due to changing pressures within the cavity. A substrate supports the optical resonant structure. An input optical pathway evanescently couples light into the optical resonant structure. An output optical pathway collects light from the optical resonance structure. A light source delivers a known light input into the input optical pathway whereby the known light input is evanescently coupled into the optical resonant structure by the input optical pathway and a portion of such light is collected from the optical resonant structure by the output optical pathway. A light detector receives the portion of the light collected from the optical resonant structure, and generates a light signal indicative of such portion of the light collected from the optical resonant structure. A temperature compensation sensor generates a temperature signal indicative of the temperature near the optical resonant structure. A spectrum detection device receives the light signal and temperature signal. The spectrum detection device analyzing the light signal and the temperature signal with a detection algorithm to generating a pressure signal indicative of the pressure within the cavity.