The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Oct. 27, 2005
Hitoshi Yamato, Takarazuka, JP;
Toshikage Asakura, Minoo, JP;
Akira Matsumoto, Amagasaki, JP;
Masaki Ohwa, Kobe, JP;
Hitoshi Yamato, Takarazuka, JP;
Toshikage Asakura, Minoo, JP;
Akira Matsumoto, Amagasaki, JP;
Masaki Ohwa, Kobe, JP;
Ciba Specialty Chemicals Corporation, Tarrytown, NY (US);
Abstract
New oxime sulfonate compounds of the formula I, II, III, IV, V, VI and VII Ris for example C–Calkylsulfonyl, Ris halogen or C–Chaloalkyl; Ris for example unsubstitude or substituted phenylenedisulfonyl, diphenylenedisulfonyl, or oxydiphenylenedisulfonyl; Aris for example a direct bond, C–Calkylene; —O—C-bond or a —O—Si-bond which cleaves upon the action of an acid; A, A, A, A, A, A, A, A, A, A, Aand Aare for example a direct bond, —O—, or —S—, or are C–Calkylene or phenylene unsubstituted or substituted; Yis C–Calkylene which is for example substituted by OR, or SR; Yis e.g. a trivalent radical of C–Calkylene; Yis e.g. a tetravalent radical of C–Calkylene; X is halogen; Ar'is for example C–Calkyl which is unsubstituted or substituted; Ar″is for example phenylene; provided that at least one of the radicals Ar′, Ar″, is substituted by 1 to 3 groups of example halogen; R, R, Rand Re.g. hydrogen or phenyl; R, R, R, RRare e.g. phenyl; are especially suitable for the preparation of photoresists.