The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Aug. 28, 2003
Kiyomi Watanabe, Kashiwa, JP;
Kiyoshi Komatsu, Tokyo, JP;
Kazuo Sakai, Tokyo, JP;
Hiroyuki Ikoshi, Tokyo, JP;
Tetsuya Matsumoto, Niiza, JP;
Toshio Kobayashi, Tokyo, JP;
Tadashi Masuda, Tokyo, JP;
Kiyomi Watanabe, Kashiwa, JP;
Kiyoshi Komatsu, Tokyo, JP;
Kazuo Sakai, Tokyo, JP;
Hiroyuki Ikoshi, Tokyo, JP;
Tetsuya Matsumoto, Niiza, JP;
Toshio Kobayashi, Tokyo, JP;
Tadashi Masuda, Tokyo, JP;
Origin Electric Company Limited, Tokyo, JP;
Abstract
A sputtering apparatus is provided with a DC power supply, an inverterthat converts DC voltage to AC voltage, a matching circuitthat transforms the AC voltage, a rectifierthat converts the transformed AC voltage to direct current, and a sputtering load. The matching circuithas a transformerthat transforms AC voltage from the inverter, inductance L provided in series with at least one of the primary windingand secondary winding, and a condenser C provided in parallel with at least one of the primary windingand secondary windingthrough inductance L.