The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Dec. 12, 2003
Christophe Lero, Leguevin, FR;
Pierre Astegno, Saint Jory, FR;
Alain Gaudon, Launac, FR;
RECIF Société Anonyme, Aussone, FR;
Abstract
A device () picks up at least one semi-conductor wafer () from a container () of wafers fitted on one side () of an aperture () in the transfer station () of a semi-conductor wafer processing plant. The device is on the opposite side () of the aperture and the pick-up is effected through it. The device incorporates a shutter () movable between open and closed positions. A wafer picking up means () is attached to the shutter and is designed to enter partially within the container below a wafer and seize the wafer by its edge. A pick up moving means () moves the picking up means () back and forth through the aperture ().