The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 17, 2007
Filed:
Jan. 26, 2005
Yoshitaka Abiko, Kyoto, JP;
Tomonori Kojimaru, Kyoto, JP;
Keiji Magara, Kyoto, JP;
Toshio Hiroe, Kyoto, JP;
Koji Hasegawa, Kyoto, JP;
Yoshitaka Abiko, Kyoto, JP;
Tomonori Kojimaru, Kyoto, JP;
Keiji Magara, Kyoto, JP;
Toshio Hiroe, Kyoto, JP;
Koji Hasegawa, Kyoto, JP;
Abstract
A substrate treating apparatus for performing a predetermined treatment of substrates includes a treating tank for storing a treating solution, a holder for holding a plurality of substrates arranged in one direction inside the treating tank, and a bubble generating device for generating bubbles in the treating solution stored in the treating tank. The bubble generating device includes a plurality of cylindrical bodies extending in the one direction and arranged in a direction perpendicular to the one direction. Each of the cylindrical bodies is at least partly formed of a porous member extending in the one direction.