The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 10, 2007

Filed:

Jul. 14, 2005
Applicants:

Chie Sato, Tokyo, JP;

Yusuke Kishine, Tokyo, JP;

Tetsuya Ohtani, Tokyo, JP;

Minoru Akutsu, Tokyo, JP;

Hiroshi Sugawara, Tokyo, JP;

Akira Toyama, Tokyo, JP;

Hirotoshi Kodaka, Tokyo, JP;

Katsuya Ikezawa, Tokyo, JP;

Shinji Kobayashi, Tokyo, JP;

Akira Miura, Tokyo, JP;

Inventors:

Chie Sato, Tokyo, JP;

Yusuke Kishine, Tokyo, JP;

Tetsuya Ohtani, Tokyo, JP;

Minoru Akutsu, Tokyo, JP;

Hiroshi Sugawara, Tokyo, JP;

Akira Toyama, Tokyo, JP;

Hirotoshi Kodaka, Tokyo, JP;

Katsuya Ikezawa, Tokyo, JP;

Shinji Kobayashi, Tokyo, JP;

Akira Miura, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 13/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An inspection apparatus inspects an inspected object based on a waveform quality of a signal that the inspected object outputs. The inspection apparatus has a power supply section which outputs a control signal that controls an output of the inspected object, a waveform measuring section which measures the signal that the inspected object outputs to generate a waveform image, an analyzing section which derives a value indicating a waveform quality from the waveform image that the waveform measuring section measures, a deciding section which decides whether or not the value derived by the analyzing section satisfies a target value, and an optimizing section which changes a set value of the control signal that the power supply section outputs, based on a decision result of the deciding section.


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