The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2007
Filed:
Jun. 30, 2005
Colleen R. Clar, Victor, NY (US);
Matthew J. Dejneka, Corning, NY (US);
Robert L. Maier, Ontario, NY (US);
Jue Wang, Fairport, NY (US);
Colleen R. Clar, Victor, NY (US);
Matthew J. Dejneka, Corning, NY (US);
Robert L. Maier, Ontario, NY (US);
Jue Wang, Fairport, NY (US);
Corning Incorporated, Corning, NY (US);
Abstract
The invention is directed to hermetically sealed optical lithography components or elements that are hermetically sealed by a durable coat of a hermetically sealing material selected from the group consisting of oxide and fluorinated oxide films. The durable coating of the hermetically sealing material is applied to one of more faces of the optical element, either directly to the face of the element or over a selected coating (for example, an anti-reflective coating) that has been applied to the element. The invention is further directed to a method of making hermetically sealed optical elements.