The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2007
Filed:
Mar. 19, 2004
Yuji Akishiba, Osaka, JP;
Yuji Akishiba, Osaka, JP;
Keyence Corporation, Osaka-shi, JP;
Abstract
A displacement gauge comprises an objective lensthat projects light onto a measurement subject, an exciting portion that vibrates the objective lensat a preset amplitude along an optical axis direction of light passing through the objective lens, a position detector for detecting the position of the objective lens, an objective lens scan portionfor scanning the objective lensalong a plane orthogonal to the optical axis direction, an objective lens movement detecting portionfor detecting the moved position of the objective lens, an operation processing portionfor calculating a distribution of displacement amount within a measuring area, based on the positional information of the objective lenswithin the measuring area detected by the objective lens movement detecting portion, and the displacement amounts measured at plural measuring points, and an output portionfor outputting the result of calculation by the operation processing portion