The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2007
Filed:
Jul. 30, 2004
Atsushi Isobe, Kodaira, JP;
Akihisa Terano, Hachioji, JP;
Kengo Asai, Hachioji, JP;
Hiroyuki Uchiyama, Musashimurayama, JP;
Hisanori Matsumoto, Kokubunji, JP;
Atsushi Isobe, Kodaira, JP;
Akihisa Terano, Hachioji, JP;
Kengo Asai, Hachioji, JP;
Hiroyuki Uchiyama, Musashimurayama, JP;
Hisanori Matsumoto, Kokubunji, JP;
Hitachi Media Electronics Co., Ltd., Mizusawa-shi, Iwate-ken, JP;
Abstract
The MEMS switch comprises a first anchor formed over a substrate, a first spring connected to the first anchor, an upper electrode which is connected to the first spring and makes a motion above the substrate, elastically deforming the first spring, a lower electrode formed over the substrate, positioned under the upper electrode, a second spring connected to the upper electrode, and a second anchor connected to the second spring. When voltage is applied between the upper and lower electrodes and the upper electrode makes a downward motion, the second anchor is brought into contact with the substrate. As a result, the second spring is elastically deformed. When the upper electrode is subsequently brought into contact with the lower electrode, thereby the upper and lower electrodes are electrically connected. The first and second anchors, first and second springs, and upper electrode are formed of identical metal in integral structure.