The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2007
Filed:
Feb. 05, 2003
Tsuyoshi Hasegawa, Wako, JP;
Masakazu Aono, Wako, JP;
Tomonobu Nakayama, Wako, JP;
Sumio Hosaka, Kiryu, JP;
Tsuyoshi Hasegawa, Wako, JP;
Masakazu Aono, Wako, JP;
Tomonobu Nakayama, Wako, JP;
Sumio Hosaka, Kiryu, JP;
Riken, Saitama, JP;
Abstract
A digital probing type atomic force microscope (AFM) for measuring high aspect structures with high precision. A probeis vibrated while moved to the vicinity of an atomic force region on a specimen surface. The position of the probe is measured when a specified atomic force is detected in the atomic force region. The probe is then moved away from the specimen surface. A servo system for maintaining a gap between the probe and specimen surface is stopped. The probe is moved to a measurement point along the specimen surface while kept away from the specimen. The vibration frequency is a frequency slightly offset from the cantilever resonance point. The atomic force is detected based on the vibration amplitude of the cantilever.