Method and structure for aluminum chemical mechanical polishing and protective layer

Abstract

A method for chemical mechanical polishing of mirror structures. The method includes providing a semiconductor substrate, e.g., silicon wafer. The method includes forming a first dielectric layer overlying the semiconductor substrate and forming an aluminum layer overlying the first dielectric layer, the aluminum layer having an upper surface with a predetermined roughness of greater than 20 Angstroms RMS. The method also includes processing regions overlying the upper surface of the aluminum layer using a touch polishing process to reduce a surface roughness of the upper surface of aluminum layer to less than 5 Angstroms to form a mirror surface on the aluminum layer. Preferably, a protective layer is formed overlying the mirror surface on the aluminum layer. The method includes patterning the aluminum layer to expose portions of the dielectric layer to form a plurality of pixel regions defined by borders from the exposed portions and forming a second dielectric layer overlying the patterned aluminum layer and exposed portions of the first dielectric layer. The method includes removing a portion of the second dielectric layer to expose the protective layer, whereupon the protective layer acts as a polish stop layer. In a specific embodiment, the selectivity between the protective layer and the second dielectric layer is 1:30 or greater.