The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2007
Filed:
Aug. 27, 2004
Allister Mcneish, Austin, TX (US);
Edmund Popp, Austin, TX (US);
Mark Brown, Pflugerville, TX (US);
Mark W. Leiby, Hyde Park, NY (US);
James J. Cerul, Kingston, NY (US);
Harvey L. Berger, Hyde Park, NY (US);
Allister McNeish, Austin, TX (US);
Edmund Popp, Austin, TX (US);
Mark Brown, Pflugerville, TX (US);
Mark W. Leiby, Hyde Park, NY (US);
James J. Cerul, Kingston, NY (US);
Harvey L. Berger, Hyde Park, NY (US);
BAE Systems Information and Electronic Systems Integration Inc., Nashua, NH (US);
Abstract
The present invention relates to an apparatus and process for producing a thin organic film on a substrate using an ultrasonic nozzle to produce a cloud of micro-droplets in a vacuum chamber. The micro-droplets move turbulently within the vacuum chamber, isotropically impacting and adhering to the surface of the substrate. The resulting product has a smooth, continuous, conformal, and uniform organic thin film, when the critical process parameters of micro-droplet size, shot size, vacuum chamber pressure, and timing are well-controlled, and defects such as 'orange peel' effect and webbing are avoided. The apparatus includes an improved ultrasonic nozzle assembly that comprises vacuum sealing and a separate, independent passageway for introducing a directed purging gas.