The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2007
Filed:
May. 12, 2006
Thomas J. Eischeid, State College, PA (US);
Michael S. Biviano, State College, PA (US);
Bradley S. Oaks, State College, PA (US);
Raghu S. Srivatsa, State College, PA (US);
Mahesh S. Bhardwaj, State College, PA (US);
Thomas J. Eischeid, State College, PA (US);
Michael S. Biviano, State College, PA (US);
Bradley S. Oaks, State College, PA (US);
Raghu S. Srivatsa, State College, PA (US);
Mahesh S. Bhardwaj, State College, PA (US);
The Ultran Group, Inc., State College, PA (US);
Abstract
An ultrasonic CMP polishing pad analyzer is disclosed. The analyzer provides a manufacturer or other user an ability to inspect a CMP polishing pad without removing the pad from the CMP machine by creating and displaying a topographical image of an in-service polishing pad. The analyzer includes an ultrasonic transducer and an analyzer body mounted to the CMP machine such that the ultrasonic transducer is positioned to receive reflected ultrasonic signals from a surface of the polishing pad.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile