The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 10, 2007
Filed:
Feb. 07, 2005
Suk-won Lee, Kunpo-si, KR;
Byung-il Ahn, Seoul, KR;
Dong-woo Kang, Daejeon, KR;
Ki-hyun Kim, Daejeon, KR;
Dae-gab Gweon, Daejeon, KR;
Dong-min Kim, Daejeon, KR;
Suk-won Lee, Kunpo-si, KR;
Byung-il Ahn, Seoul, KR;
Dong-woo Kang, Daejeon, KR;
Ki-hyun Kim, Daejeon, KR;
Dae-gab Gweon, Daejeon, KR;
Dong-min Kim, Daejeon, KR;
Samsung Electronics Co., Ltd., Suwon-si, KR;
Abstract
A stage apparatus may include a first stage, a second stage movable with respect to the first stage, at least one flexure hinge to connect the first stage with the second stage, a plurality of actuators provided between the first stage and the second stage to push the first stage and the second stage and to be symmetric with respect to a center of the first stage and the second stage, and a controller to control the plurality of actuators to move one of the first stage and the second stage with respect to the other one of the first stage and the second stage. Thus, a position error of the stage can be reduced, which enables an ultra precision position control. Further, a piezoelectric driver using piezoelectric elements may be used as the actuator to decrease the position error more than a conventional driver such as a motor. The position error may be decreased to ±10 nm.