The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2007
Filed:
Apr. 21, 2005
Applicants:
Hidehiko Mori, Hachiouji, JP;
Yoshiyuki Tomita, Hiratsuka, JP;
Kazutoshi Sakaki, Fujisawa, JP;
Inventors:
Assignee:
Sumitomo Heavy Industries, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 7/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The present invention provides a vacuum stage device that moves a substrate to be processed in a vacuum environment. In a substrate transfer device in accordance with the present invention, a wafer mounted to a wafer platen is moved in a vacuum processing chamber. This substrate transfer device includes a first driving mechanism for moving the wafer platen in a Ydirection, and a second driving mechanism that is provided in the vacuum processing chamber and linearly reciprocates the wafer platen in Xand Xdirections at a high speed.