The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 03, 2007
Filed:
Dec. 13, 2000
Applicant:
Takeo Nozaki, Tokyo, JP;
Inventor:
Takeo Nozaki, Tokyo, JP;
Assignee:
NEC Corporation, , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G01N 37/00 (2006.01); G06F 19/00 (2006.01); G01C 17/38 (2006.01); G01P 21/00 (2006.01); G06K 9/40 (2006.01); G06F 15/00 (2006.01); H03F 1/26 (2006.01); H04B 15/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
In this pattern inspection device, the optical scanning section scans the inspected pattern using a laser beam. A photoelectric image processing section generates an image of the inspected pattern. A reference image generation section calculates the gray level of each pixel according to the number of sub-pixels belonging to the pattern developed in each pixel and calculates the pattern width for the inspected pattern and the reference data with treating the count obtained by dividing the gray level by the gray level step count as the width of the pattern developed in that pixel.